Vertical recording medium with thin soft magnetic film

ABSTRACT

A vertical magnetic recording medium includes a soft magnetic film formed on a substrate, and a vertical magnetization film formed on the soft magnetic film. μ·δb≧=1000, when μ is a permeability of the soft magnetic film, and δb [nm] is a film thickness of the soft magnetic film. The permeability μ of the soft magnetic film is 5≦μ≦200, and the film thickness δb of the soft magnetic film is equal to or less than 500 nm. Also, vertical magnetic anisotropy energy Ku [erg/cc] of the vertical magnetization film is 1×10 7 ≦Ku≦7×10 8 , and coercive force Hc [kOe] of the vertical magnetization film in the vertical direction to a surface of the vertical magnetization film is 5≦Hc≦10.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a vertical magnetic recording medium suitable for a magnetic disk.

[0003] 2. Description of the Related Art

[0004] In recent years, a much larger capacity and a much smaller size have been required for had disk drives, as information devices such as personal computers and work stations have progressed. In magnetic disks, much higher density is also required.

[0005] However, in a longitudinal magnetic recording method which has been being widely used, problems arise in that miniaturization of recording bits incurs heat fluctuation in recording magnetization and that a higher coercive force which may exceed the recording ability of a recording head is required, when realizing a high recording density. Hence, a vertical magnetic recording method has been discussed as a magnetic recording method capable of greatly improving the recording density while solving the problems described above. As a kind of vertical magnetic recording medium which realizes this method, there is a vertical magnetic recording medium having a two-layer structure which is composed of a soft magnetic film with a high magnetic permeability and a vertical magnetization film with a high vertical anisotropy.

[0006]FIG. 1 is a schematic cross sectional view showing an example of a conventional vertical magnetic recording medium. The vertical magnetic recording medium 21 is composed of a lower soft magnetic film 23 and a vertical magnetization film 24 which are laminated in an order on a substrate 22 made of non-magnetic material. For example, a NiFe film is used as the lower soft magnetic film 23, and CoCr-based alloy is used for the vertical magnetization film 24 (Nippon-Ouyou-Jiki-Gakkai-Shi, Vol. 8, No. 1, 1984, pp. 17-22).

[0007] This vertical magnetic recording medium 21 achieves recording more easily than a conventional longitudinal magnetic recording method because of existence of the lower soft magnetic film 23. That is, this vertical magnetic recording medium 21 can easily perform recording since it has much greater vertical magnetic anisotropic energy than the magnetic anisotropic energy of a conventional longitudinal magnetic recording medium in the longitudinal direction and also has much greater coercive force in the direction vertical to the film surface than a conventional longitudinal magnetic recording medium. Therefore, the vertical magnetic recording medium 21 can be stronger against heat fluctuation than a medium according to the longitudinal magnetic recording method. To deal with the problem of the heat fluctuation, it tends to use a film having high vertical magnetic anisotropic energy and coercive force in the direction vertical to the film surface greater than those of a CoCr-based film which has been the main trend of vertical magnetic films.

[0008] Meanwhile, in the conventional vertical magnetic recording medium using a vertical magnetization film which has great vertical magnetic anisotropic energy and large coercive force in the direction vertical to the film surface, the magnetic permeability μ and film thickness δ_(b) of the lower soft magnetic film must be set to greater values in order to maintain a recording sensitivity, than in the case of using a conventional vertical magnetization film.

[0009] Where a practical medium manufacturing process is considered, the lower soft magnetic film should be thinner as much as possible. This is because a manufacturing process of the vertical magnetization film formed on the lower soft magnetic film becomes easier. The vertical magnetization film determines the recording/reproducing ability at a high recording density, when the lower soft magnetic film is thinned.

[0010] In conjunction with the above description, a vertical magnetic recording medium is disclosed in Japanese Laid Open Patent Application (JP-A-Heisei 4-283413). In this reference, a lower soft magnetic lining layer (12) and a vertical magnetization film (13) are formed in order on a non-magnetic material substrate (11). After a magnetic polar surface layer of the lower soft magnetic layer (12) is removed by an ion etching method or an inverse sputtering method, the vertical magnetization film (13) is formed thereon. The coercive force of the vertical magnetization film (13) becomes gradually smaller into a direction of the phase boundary with the lower soft magnetic layer (12) from the surface of the vertical magnetization film (13). Also, the saturation magnetization becomes gradually larger into a direction of the phase boundary with the lower soft magnetic layer (12) from the surface of the vertical magnetization film (13).

[0011] Also, a vertical magnetic recording medium is disclosed in Japanese Laid Open Patent Application (JP-A-Heisei 6-139542). In this reference, a lower soft magnetic layer (12) and a vertical magnetization film (13) are formed in order on a non-magnetic material substrate (11). The lower soft magnetic layer (12) has the relative permeability in a range of 20 to 1000 and the saturation magnetic flux density of 10 kG or more.

[0012] Also, a vertical magnetic recording medium is disclosed in Japanese Laid Open Patent Application (JP-A-Heisei 11-149628). In this reference, the vertical magnetic recording medium (20) is composed of a substrate (22), a lower soft magnetic film (24) formed on the substrate (22), and a vertical magnetization film 28 formed on the lower soft magnetic film (24). The lower soft magnetic film (24) is provided not to have a non-magnetic wall structure. The coercive force of the lower soft magnetic film (24) is equal to or less than 300 Oe.

SUMMARY OF THE INVENTION

[0013] An object of the present invention is to provide a vertical magnetic recording medium which can comply with thinning of the lower soft magnetic film.

[0014] Another object of the present invention is to provide a vertical magnetic recording medium which has large vertical magnetic anisotropic energy and large coercive force in the direction vertical to the film surface.

[0015] Still another object of the present invention is to provide a vertical magnetic recording medium which can eliminate the problem of heat fluctuation.

[0016] In order to achieve an aspect of the present invention, a vertical magnetic recording medium includes a soft magnetic film formed on a substrate, and a vertical magnetization film formed on the soft magnetic film, μ·δb≧1000, when μ is a permeability of the soft magnetic film, and δb [nm] is a film thickness of the soft magnetic film.

[0017] Here, it is desirable that the permeability μ of the soft magnetic film is 5≦μ≦200. Also, it is desirable that the film thickness δb of the soft magnetic film is equal to or less than 500 nm.

[0018] Also, it is desirable that vertical magnetic anisotropy energy Ku [erg/cc] of the vertical magnetization film is 1×10⁷≦Ku≦7×10⁸. Also, it is desirable that coercive force Hc [kOe] of the vertical magnetization film in the vertical direction to a surface of the vertical magnetization film is 5≦Hc≦10.

[0019] Also, the vertical magnetization film may include FePt alloy. In this case, it is desirable that the vertical magnetization film comprises xat%Fe-(100-x)at%Pt alloy, where 40≦x≦60. It is more desirable that the vertical magnetization film comprises 50at%Fe-50at%Pt alloy, where x=50 at%.

[0020] Also, the vertical magnetization film may include RCo alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr. In this case, the vertical magnetization film may include RCo₅ alloy, where R is one or more selected from the group consisting of Y, Ce and Sm. Alternatively, the vertical magnetization film may include R₂Co₁₇ alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr.

[0021] Also, the soft magnetic film may include FeSiAl alloy. In this case, it is desirable that the vertical magnetization film comprises 84.9wt%Fe-xwt%Si-(15.1-x)wt%Al alloy, where 8.0≦x≦12.0. It is more desirable that the vertical magnetization film may include 84.9wt%Fe-9.6wt%Si-5.5wt%Al.

[0022] Also, the soft magnetic film may include CoNiFe alloy. Especially, it is desirable that the soft magnetic film may include 62at%Co-12at%Ni-26at%Fe alloy.

[0023] In order to achieve another aspect of the present invention, a vertical magnetic recording medium includes a soft magnetic film formed on a substrate, and a vertical magnetization film formed on the soft magnetic film, and μ·δb≧1000 when μ is a permeability of the soft magnetic film, and δb [nm] is a film thickness of the soft magnetic film. In addition, the permeability μ of the soft magnetic film is 5≦μ≦200, and the film thickness δb of the soft magnetic film is equal to or less than 500 nm.

[0024] Here, it is desirable that the vertical magnetization film may include FePt alloy or RCo alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr.

[0025] Also, it is desirable that the soft magnetic film may include FeSiAl alloy or CoNiFe alloy.

[0026] Also, it is desirable that vertical magnetic anisotropy energy Ku [erg/cc] of the vertical magnetization film is 1×10⁷≦Ku≦7×10⁸, and coercive force Hc [kOe] of the vertical magnetization film in the vertical direction to a surface of the vertical magnetization film is 5≦Hc≦10.

BRIEF DESCRIPTION OF THE DRAWINGS

[0027]FIG. 1 is a schematic cross sectional view showing an example of a conventional vertical magnetic recording medium;

[0028]FIG. 2 is a cross sectional view showing a vertical magnetic recording medium according to the present invention;

[0029]FIG. 3 is a cross sectional view showing a specific example of the vertical magnetic recording medium according to the present invention; and

[0030]FIG. 4 shows a relation of magnetic permeability μ of the lower soft magnetic film and the film thickness δ_(b) thereof in a region where reproduce output is secured.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] Hereinafter, a vertical magnetic recording medium according to the present invention will now be described below in detail with reference to the attached drawings.

[0032]FIG. 2 is a cross sectional view showing a vertical magnetic recording medium according to the present invention. The vertical magnetic recording medium 1 is composed of a lower soft magnetic film 3 with a magnetic permeability μ and a film thickness δ_(b), and a vertical magnetization film 4 which are laminated on a substrate 2 made of non-magnetic material.

[0033] It is preferable that the magnetic permeability μ of the lower soft magnetic film 3 satisfies 5≦μ≦200, and the film thickness δ_(b) thereof is 500 nm or less. For example, alloys such as FeSiAl alloy and CoNiFe alloy are used for the lower soft magnetic film 3. It is preferable that as the FeSiAl alloy is used is 84.9wt%Fe-Xwt%Si-(15.1-X)wt%Al alloy (hereinafter, to be referred to as Fe_(84.9)-Si_(X)-Al_(15.1)-X alloy) where 8.0≦X≦12.0 is satisfied, for example. More preferably, the composition of the FeSiAl alloy is 84.9wt%Fe-9.6wt%Si-5.4wt%Al. Also, it is preferable that 62at%Co-12at%Ni-26at%Fe is used as the CoNiFe alloy, for example.

[0034] It is preferable that the vertical magnetization film 4 has the vertical magnetic anisotropic energy Ku [erg/cc] in a range of 1×10⁷≦Ku≦ 7×10⁸, and the coercive force Hc [kOe] in the direction vertical to its film surface in a range of 5≦Hc≦10. For example, FePt alloy or RCo alloy (where R is one or more selected from the group consisting of Y, Ce, Sm, La, and Pr) is used for the vertical magnetization film 4. It is preferable that as the FePt alloy is used Xat%Fe-(100-X)at%Pt alloy (hereinafter, to be referred to as Fe_(x)-Pt_(100-x)) where 40≦X≦60 is satisfied, for example. It is more preferable that composition of the FePt alloy is 50at%Fe-50at%Pt. Also, it is preferable that as the Rco alloy is Rco₅ alloy (where R is one or more selected from the group consisting of Y, Ce, and Sm), R₂Co₁₇ alloy (where R is one or more selected from the group consisting of Y, Ce, Sm, La, and Pr). In the vertical magnetic recording medium 1, a condition of μ·δ_(b)>1000 is satisfied where the magnetic permeability of the lower soft magnetic film 3 is μ and the thickness thereof is δ_(b) [nm]. Therefore, sufficient reproduction sensitivity can be maintained even if the lower soft magnetic film 3 is thinned.

[0035]FIG. 3 is a cross sectional view showing a specific example of a vertical magnetic recording medium according to the first embodiment. The vertical magnetic recording medium 11 is composed of a 84.9wt%Fe-9.6wt%Si-5.5wt%Al film 13 (hereinafter to be referred to as a Fe_(84.9)Si_(9.6)Al_(5.5) film 13) as a lower soft magnetic film with a magnetic permeability μ and a film thickness δ_(b), and a 50at%Fe-50at%Pt film 14 (hereinafter to be referred to as a Fe₅₀Pt₅₀ film 14) as a vertical magnetization film 4, which are laminated on a substrate 2 made of non-magnetic material.

[0036] Next, a vertical magnetic recording medium according to the present invention will be described more specifically.

[0037] [The First Embodiment]

[0038] Samples were formed to have Fe_(84.9)Si_(9.6)Al_(5.5) films 13 which were formed on substrates 12 of a 2.5-inch size at the substrate temperature of 400° C. by a sputtering method by use of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets of a 6-inch size. The samples had ten different thicknesses of 2, 5, 10, 20, 50, 100, 200, 250, 500, and 750 nm. The film forming condition was set in such a manner that the supplied electric power was 0.5 kw, the argon gas pressure was 4 mTorr (5.31×10⁻¹ Pa), and the film forming rate was 3 nm/sec at the initial vacuum degree of 5×10⁻⁷ mTorr (6.65× 10⁻⁸ Pa) to 7 mTorr (9.31×10⁻¹ Pa).

[0039] The ten types of samples were heated with a lamp in a sputter chamber. The heating time was changed so as to prepare the ten samples with Fe_(84.9)Si_(9.6)Al_(5.5) films 13 having different magnetic permeabilities μ. The magnetic permeabilities μ were changed in a range of seven types of 2, 5, 10, 20, 50, 100, and 200. In other words, mediums respectively having seven types of magnetic permeabilities μ were prepared for each of ten types of different film thicknesses δ_(b). Thus, total seventy different types mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films 13 were prepared. The mediums with the Fe_(84.9)Si_(9.6)Al_(5.5) films 13 having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δb)= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums A1 to A6 in the first embodiment.

[0040] Also, Fe₅₀Pt₅₀ films 14 were respectively formed on Fe_(84.9)Si_(9.6)Al_(5.5) films 13 by 50 nm at the substrate temperature of 450° C. by use of a target of 50at%Fe-50at%Pt, for the purpose of measurement of magnetic permeabilities. Further, a C protection film was formed by 5 nm on each of the Fe₅₀Pt₅₀ films 14.

[0041] Also, as comparison examples, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films 13 having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparative mediums AA1 to AA4. In addition, a medium with Fe_(84.9)Si_(9.6)Al_(5.5) films 13 having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=400, e.g., (μ, δ_(b))=(20, 20) was named a comparison medium AA5. Further, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films 13 having combinations of permeabilities μ=2 to 200 and a film thickness δb= 750 nm were respectively named comparison mediums AA6 to AA12.

[0042] Further, samples were formed on substrates of a 12-inch size at the substrate temperature of 400° C. by a sputtering method by use of 21.5wt%Ni-78.5wt%Fe target of a 6-inch size, to have five different thicknesses of 5, 10, 50, 100, and 200 nm. The film forming condition was set in such a manner that the supplied electric power was 0.5 KW, the argon gas pressure was 4 mTorr (5.31×10⁻¹ Pa), and the film forming speed was 3 nm/sec, at the initial vacuum degree of 5×10⁻⁷ mTorr (6.65×10⁻⁸ Pa) to 7 mTorr (9.31×10⁻¹ Pa). The samples with the Ni_(21.5)Fe_(78.5) films having different film thicknesses were heated with a lamp in a sputter chamber. The heating time was changed so as to prepare Ni_(21.5)Fe_(78.5) films having different magnetic permeabilities μ. The magnetic permeabilities μ were changed in a range of seven kinds of 2, 5, 10, 20, 50, 100, and 200. In other words, mediums with the Ni_(21.5)Fe_(78.5) films respectively having seven magnetic permeabilities μ were prepared for every one of five different film thicknesses δ_(b). Thus, total thirty-five different kinds of samples with Ni_(21.5)Fe_(78.5) films were prepared.

[0043] Samples with Fe₅₀Pt₅₀ films were respectively formed on the Ni_(21.5)Fe_(78.5) films by 50 nm by use of 50at%Fe-50at%Pt targets for the purpose of measurement of magnetic permeability. Further, a C protection film was formed by 5 nm on each of the samples. At this time, mediums with the Ni_(21.5)Fe_(78.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))= (10, 200), (20, 100), (100, 20), and (200, 10) were respectively named conventional mediums AB1 to AB4. In addition, mediums with the Ni_(21.5)Fe_(78.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δb)=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named conventional comparison mediums AC1 to AC6. It should be noted that the Ni_(21.5)Fe_(78.5) film was generally used for a lower soft magnetic film conventionally.

[0044] Then, the vertical magnetic anisotropic energy Ku of each Fe₅₀Pt₅₀ film was measured by a magnetic torque meter to find Ku=7×10⁷ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=5.5 [kOe].

[0045] Recording/reproducing tests were carried out to total seventy kinds of vertical magnetic recording mediums having seven kinds of permeabilities for each of ten different film thicknesses of Fe_(84.9)Si_(9.6)Al_(5.5) films 13, by use of a monopolar head and a MR head respectively used as a recording head and a reproducing head. The MR head had a reproduction track width of 1 μm and a reproduction gap length of 0.1 μm. The monopolar head has a track width of 1.5 μm. Evaluations were carried out under the condition that the recording current was 10 mAop, the sense current was 12 mA, the circumferential speed was 12.7 m/s, and the floating amount was 45 nm. A signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured.

[0046] Table 1 shows reproduced outputs (μV) of the seventy kinds of samples with Fe_(84.9)Si₉₆Al_(5.5) films 13. This table shows the mediums according to the first embodiment and the mediums of comparison examples clearly separated. TABLE 1 Reproduced output

[0047] As can be seen from the table 1, the reproduced outputs were sufficiently secured in the region lower than the mediums A1 to A6 in the first embodiment, (i.e., in the region of the present embodiment). On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums AA6 to AA12, (i.e., in the region of the conventional samples).

[0048]FIG. 4 shows the results obtained above in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. As seen from this FIG. 4, sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 was satisfied.

[0049] In case where the magnetic permeability μ of the lower soft magnetic film is 2, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). Also, in case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and film thickness δ_(b) of the lower soft magnetic film are lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film was disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design, even if the relationship of μ·δ_(b)≦1000 is satisfied. It is necessary to satisfy the relationship of μ·δ_(b)≧1000 and simultaneously to satisfy a relationship of 5≦μ ≦200 and a relationship that δ_(b) is 500 nm or less.

[0050] Similarly, a signal having a recording density of 300 kFRPI was recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs were thereafter measured with a MR head. The measurement values were shown in Table 2. TABLE 2 Reproduced output Conventional Conventional Conventional Conventional Medium Medium Medium Medium AB1 AB2 AB3 AB4 460 522 516 503 Conven- Conven- Conven- Conven- Conven- Conven- tional tional tional tional tional tional compari compari compari compari compari compari son son son son son son medium medium medium medium medium medium AC1 AC2 AC3 AC4 AC5 AC6 192 142 152 165 174 187 Unit: μV

[0051] As can be seen from the Table 2, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity and the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more, in case of a vertical magnetic recording medium which uses a Ni_(21.5)Fe_(78.5) film as the lower soft magnetic film. From the above, a vertical magnetic recording medium having a Fe_(84.9)Si_(9.6)Al_(5.5) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical magnetic recording medium having a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is smaller. As a result of this, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(9.6)Al_(5.5) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(9.6)Al_(5.5) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0052] From the above, if a Fe_(84.9)Si_(9.6)Al_(5.5) film is used in place of a Ni_(21.5)Fe_(78.5) film for a vertical magnetic recording medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧ 1000 is satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(9.6)Al_(5.5) film is μ and the film thickness thereof is μ_(b), the recording/reproducing sensitivity can be sufficiently obtained even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the first embodiment. As a result, by using a Fe_(84.9)Si₉₆Al_(5.5) film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5 ≦μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be more thinned than the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the first embodiment.

[0053] [The Second Embodiment]

[0054] Like the first embodiment, total seventy different kinds of samples with Fe84.9Si_(9.6)Al_(5.5) films were prepared by use of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets, i.e., Fe_(84.9)Si_(9.6)Al_(5.5) films respectively having seven different magnetic permeabilities μ were prepared for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared by use of 40at%Fe-60at%Pt targets in place of the 50at%Fe-50at%Pt targets in the first embodiment, on Fe_(84.9)Si_(9.6)Al_(5.5) films formed separately from those formed for the purpose of measurement of magnetic permeability.

[0055] At this time, like the first embodiment, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums B1 to B6 according to the second embodiment. In addition, mediums with Fe_(84.9)Si₉₆Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums BB1 to BB4. Also, a medium having Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)=400, e.g., (μ, δ_(b))=(20, 20) was named a comparison medium BB5. Further, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films each having permeabilities μ= 2 to 200 and a film thickness δ_(b)=750 nm were respectively named comparison mediums BB6 to BB12.

[0056] Also, in the second embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δb=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0057] Then, the vertical magnetic anisotropic energy Ku of each Fe₄₀Pt₆₀ film was measured by a magnetic torque meter to find Ku=1×10⁸ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=7.0 [kOe].

[0058] Recording/reproducing tests were carried out to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 3 shows the values of reproduced outputs. This table 3 also shows which values belong to which of the mediums according to the second embodiment and the comparison mediums. TABLE 3 reproduced output

[0059] As can be seen from the table 3, the reproduced outputs are sufficiently secured in the region lower than the mediums B1 to B6 in the second embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums BB6 to BB12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. As seen from this FIG. 4, sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0060] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). Also, in case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) are lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 is satisfied. It is necessary to satisfy the relationship of μ·δ_(b)≧1000 and simultaneously to satisfy a relationship of 5≦μ≦200 and a relationship that δ_(b) is 500 nm or less.

[0061] On the other hand, a signal having a recording density of 300 kFRPI is recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs are thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, it could be understood that a vertical two-layer medium which uses a Fe_(84.9)Si_(9.6)Al_(5.5) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(9.6)Al_(5.5) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(9.6)Al_(5.5) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0062] From the above, if a Fe_(84.9)Si_(9.6)Al_(5.5) film is used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 is satisfied and if relationships of 5≦μ≦200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(9.6)Al_(5.5) film is μ and the film thickness thereof is δ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the second embodiment. As a conclusion, by using a Fe_(84.9)Si_(9.6)Al_(5.5) film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦ μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be made thinner than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the second embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film is made thin and a process of manufacturing a medium is made easier.

[0063] [The third Embodiment]

[0064] Like the first embodiment, total seventy different kinds of samples with Fe_(84.9)Si_(9.6)Al_(5.5) films were prepared by use of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets, i.e., Fe_(84.9)Si_(9.6)Al_(5.5) films respectively having seven different magnetic permeabilities μ were prepared for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using 60at%Fe-40at%Pt targets in place of the 50at%Fe-50at%Pt targets in the first embodiment, on Fe_(84.9)Si_(9.6)Al_(5.5) films formed separately from those formed for the purpose of magnetic permeability measurement.

[0065] At this time, like the first embodiment, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums C1 to C6 according to the third embodiment. In addition, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δb=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums CC1 to CC4. Also, a medium having Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)=400, e.g., (μ, δ_(b))=(20, 20) was named a comparison medium CC5. Further, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films each having permeabilities μ= 2 to 200 and a film thickness δ_(b)=750 nm were respectively named comparison mediums CC6 to CC12.

[0066] Also, in the second embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δb=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0067] Then, the vertical magnetic anisotropic energy Ku of each Fe₆₀Pt₄₀ film was measured by a magnetic torque meter to find Ku=5×10⁷ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=5.0 [kOe].

[0068] Recording/reproducing tests were made to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 4 shows the values of reproduced outputs. This table 4 also shows which values belong to which of the mediums according to the third embodiment and the comparison mediums. TABLE 4 Reproduced output

[0069] As can be seen from the table 4, the reproduced outputs were sufficiently secured in the region lower than the mediums C1 to C6 in the third embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums CC6 to CC12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. From this FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0070] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). Also, in case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) of the lower soft magnetic film were lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed thereon is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 is satisfied. But, it is necessary to satisfy the relationship of μ·δ_(b)≧1000 and to satisfy simultaneously a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0071] On the other hand, a signal having a recording density of 300 kFRPI was recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs are thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Fe_(84.9)Si_(9.6)Al_(5.5) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(9.6)Al_(5.5) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(9.6)Al_(5.5) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0072] From the above, if a Fe_(84.9)Si_(9.6)Al_(5.5) film is used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 was satisfied and if relationships of 5≦μ≦200 and δ_(b)≦500 nm are simultaneously satisfied where the magnetic permeability of the Fe_(84.9)Si_(9.6)Al_(5.5) film is μ and the film thickness thereof is δ_(b), a sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the present embodiment. As a result, by using a Fe_(84.9)Si_(9.6)Al_(5.5) film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦ μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be made thinner than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the present embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film can be made thin and a process of manufacturing a medium can be made easier.

[0073] It should be noted that since similar advantages were obtained by using respectively Fe₄₀Pt₆₀ films in the second embodiment, Fe₅₀Pt₅₀ films in the first embodiment, and Fe₆₀Pt₄₀ films in the third embodiment as vertical magnetization films, it is apparent that the vertical magnetic anisotropic energy is distributed within a range of 5×10⁷ [erg/cc]≦Ku≦1×10⁸ [erg/cc] and the coercive force in the direction vertical to the film surface is distributed within a range of 5 [kOe]≦Hc≦7 [kOe] as long as a Fe_(X)Pt_(100-X) film has X which falls in the range of 40≦X≦60 in Xat%Fe-(100-X)at%Pt. Hence, it was also apparent that similar advantages can be obtained as long as a Fe_(X)Pt_(100-X) film has X which falls in the range of 40≦X≦60 in Xat%Fe-(100-X)at%Pt.

[0074] [The fourth Embodiment]

[0075] In the same manner as in the first embodiment, Fe_(84.9)Si_(8.0)Al_(7.1) films were formed on substrates using 84.9wt%Fe-8.0wt%Si-7.1wt%Al targets in place of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets used in the first embodiment. Like the first embodiment, total seventy different kinds of Fe_(84.9)Si_(8.0)Al_(7.1) films were prepared to have seven different magnetic permeabilities μ for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using YCo₅ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Fe_(84.9)Si_(8.0)Al_(7.1) films formed separately from those formed for the purpose of measurement of magnetic permeability.

[0076] At this time, like the first embodiment, mediums with Fe_(84.9)Si_(8.0)Al_(7.1) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums D1 to D6 according to the fourth embodiment. In addition, mediums with Fe_(84.9)Si_(8.0)Al_(7.1) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums DD1 to DD4. Also, a medium having Fe_(84.9)Si_(8.0)Al_(7.1) films each having a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)= 400, e.g., (μ, δ_(b))=(20, 20) was named a comparison medium DD5. Further, mediums with Fe_(84.9)Si_(8.0)Al_(7.1) films each having permeabilities μ=2 to 200 and a film thickness δ_(b)=750 nm were respectively named comparison mediums DD6 to DD12.

[0077] Also, in the fourth embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic films were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0078] Then, the vertical magnetic anisotropic energy Ku of each YCO₅ film was measured by a magnetic torque meter to find Ku=1×10⁷ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=6.5 [kOe].

[0079] Recording/reproducing tests were carried out to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 5 shows the values of reproduced outputs. This table 5 also shows which values belong to which of the mediums according to the present embodiment and the comparison mediums. TABLE 5 Reproduced output

[0080] As can be seen from the table 5, the reproduced outputs were sufficiently secured in the region lower than the mediums D1 to D6 of the present embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums DD6 to DD12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. From this FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0081] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). In case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) were lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed thereon is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b≧1000) cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 was satisfied. It is necessary to satisfy the relationship of μ·δ_(b)≧1000 and simultaneously to satisfy a relationship of 5≦μ ≦200 and a relationship that δ_(b) was 500 nm or less.

[0082] On the other hand, a signal having a recording density of 300 kFRPI is recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs are thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Fe_(84.9)Si_(8.0)Al_(7.1) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(8.0)Al_(7.1) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(8.0)Al_(7.1) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0083] From the above, if a Fe_(84.9)Si_(8.0)Al_(7.1) film was used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 is satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(8.0)Al_(7.1) film is μ and the film thickness thereof is μ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the fourth embodiment. As a conclusion, by using a Fe_(84.9)Si_(8.0)Al_(7.1) film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦ μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be made thinner than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the fourth embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film can be made thin and process of manufacturing a medium can be made easier.

[0084] [The Fifth Embodiment]

[0085] In the same manner as in the first embodiment, Fe_(84.9)Si_(12.0)Al_(3.1) films were formed on substrates using 84.9wt%Fe-12.0wt%Si-3.1wt%Al targets in place of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets used in the first embodiment. Like the first embodiment, total seventy different kinds of Fe_(84.9)Si_(12.0)Al_(3.1) films were prepared to have seven different magnetic permeabilities μ for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using CeCo₅ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Fe_(84.9)Si_(12.0)Al_(3.1) films formed separately from those formed for the purpose of magnetic permeability measurement.

[0086] At this time, like the first embodiment, mediums with Fe_(84.9)Si_(12.0)Al_(3.1) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums E1 to E6 according to the fifth embodiment. In addition, mediums with Fe_(84.9)Si_(12.0)Al_(3.1) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums EE1 to EE4. Also, a medium having Fe_(84.9)Si12.0Al_(3.1) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)=400, e.g., (μ, δ_(b))=(20, 20) was named a comparison medium EE5. Further, mediums having permeabilities μ=2 to 200 and a film thickness δ_(b)=750 nm were respectively named comparison mediums EE6 to EE12.

[0087] Also, in the fifth embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) as the lower soft magnetic films which were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0088] Then, the vertical magnetic anisotropic energy Ku of each CeCo₅ film was measured by a magnetic torque meter to find Ku=5.5×10⁷ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=6.5 [kOe].

[0089] Recording/reproducing tests were made to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 6 shows the values of reproduced outputs. This table 6 also shows which values belong to which of the mediums according to the present embodiment and the comparison mediums. TABLE 6 Reproduced outputs

[0090] As can be seen from the table 6, the reproduced outputs were sufficiently secured in the region lower than the mediums E1 to E6 of the present embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums EE6 to EE12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. From FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0091] Also, in case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b), Also, in case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) were lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 was satisfied. It is necessary to satisfy the relationship of μ·δ_(b)≧1000 and to satisfy simultaneously a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0092] On the other hand, a signal having a recording density of 300 kFRPI is recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs were thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Fe_(84.9)Si_(12.0)Al_(3.1) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(12.0)Al_(3.1) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(12.0)Al_(3.1) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0093] From the above, if a Fe_(84.9)Si_(12.0)Al_(3.1) film was used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 was satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm were satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(12.0)Al_(3.1) film is μ and the film thickness thereof is δ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the present embodiment. As a conclusion, by using a Fe_(84.9)Si_(12.0)Al_(3.1) film as a lower soft magnetic film and by satisfying the conditions of ν·δ_(b)≧1000, 5≦ μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be more thinned than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the fifth embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film can be made thinner and a process of manufacturing a medium can be made easier.

[0094] It should be noted that since similar advantages are obtained by using respectively Fe_(84.9)Si_(8.0)Al_(7.1) films in the fourth embodiment, Fe_(84.9)Si_(9.6)Al_(5.5) films in the first embodiment, and Fe_(84.9)Si_(12.0)Al_(3.1) films in the fifth embodiment as vertical magnetization films, it is apparent that similar advantages can be obtained as long as a Fe_(84.9)-Si_(X)-Al_(15.1-X) lower soft magnetic film has X which falls in the range of 8.0≦X≦12.0 (wt %) in Fe_(84.9)-Si_(X)-Al_(15.1-X).

[0095] [The sixth Embodiment]

[0096] In the same manner as in the first embodiment, Co₆₂Ni₁₂Fe₂₆ films were formed on substrates using 62wt%Co-12wt%Ni-26wt%Fe targets in place of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets used in the first embodiment. Like the first embodiment, total seventy different kinds of Co₆₂Ni₁₂Fe₂₆ films were prepared to have seven different magnetic permeabilities μ for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using SmCo₅ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Co₆₂Ni₁₂Fe₂₆ films formed separately from those formed for the purpose of magnetic permeability measurement.

[0097] At this time, like the first embodiment, mediums having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums F1 to F6 according to the present embodiment. In addition, mediums having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))= (5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums FF1 to FF4. Also, a medium having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies ν·δ_(b)=400, e.g., (ν, 5b)= (20, 20) was named a comparison medium FF5. Further, mediums having Co₆₂Ni₁₂Fe₂₆ films each having permeabilities μ=2 to 200 and a film thickness δ_(b)= 750 nm were respectively named comparison mediums FF6 to FF12.

[0098] Also, in the fifth embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) as the lower soft magnetic films were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)= 1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0099] Then, the vertical magnetic anisotropic energy Ku of each SmCo₅ film was measured by a magnetic torque meter to find Ku=1×10⁸ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=7.0 [kOe].

[0100] Recording/reproducing tests were made to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 7 shows the values of reproduced outputs. This table 7 also shows which values belong to which of the mediums according to the present embodiment and the comparison mediums. TABLE 7 Reproduced output

[0101] As can be seen from the table 7, the reproduced outputs are sufficiently secured in the region lower than the mediums F1 to F6 of the present embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums FF6 to FF12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. From this FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0102] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). In case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) were lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of ν·δ_(b)≧1000 is satisfied. It is necessary to satisfy the relationship of μ·δ_(b)≧1000 and simultaneously to satisfy a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0103] On the other hand, a signal having a recording density of 300 kFRPI is recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs are thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Co₆₂Ni₁₂Fe₂₆ film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Co₆₂Ni₁₂Fe₂₆ film has greater saturation magnetization than the Ni_(21.5)Fe_(78.5) film. Therefore, the Co₆₂Ni₁₂Fe₂₆ film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0104] From the above, if a Co₆₂Ni₁₂Fe₂₆ film is used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧ 1000 is satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Co₆₂Ni₁₂Fe₂₆ film is μ and the film thickness thereof is δ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the sixth embodiment. As a conclusion, by using a Co₆₂Ni₁₂Fe₂₆ film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be made thinner than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the present embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium which enables thinning of the lower soft magnetic film and easier process of manufacturing a medium.

[0105] [The Seventh Embodiment]

[0106] Like the first embodiment, total seventy different kinds of samples having Fe_(84.9)Si_(9.6)Al_(5.5) films were prepared by use of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets, i.e., Fe_(84.9)Si_(9.6)Al_(5.5) films respectively having seven different magnetic permeabilities μ were prepared for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using Y₂Co₁₇ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Fe_(84.9)Si_(9.6)Al_(5.5) films formed separately from those formed for the purpose of measurement of magnetic permeability. At this time, like the first embodiment, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums G1 to G6 according to the seventh embodiment. In addition, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))= (5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums GG1 to GG4. Also, a medium having Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)=400, e.g., (μ,δ_(b))= (20, 20) was named a comparison medium GG5. Further, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films each having permeabilities μ=2 to 200 and a film thickness δ_(b)= 750 nm were respectively named comparison mediums GG6 to GG12.

[0107] Also, in the seventh embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) as the lower soft magnetic films were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic film were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δb)=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0108] Then, the vertical magnetic anisotropic energy Ku of each Y₂Co₁₇ film was measured by a magnetic torque meter to find Ku=2×10⁸ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=8.0 [kOe].

[0109] Recording/reproducing tests were made on total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 8 shows the values of reproduced outputs. This table 8 also shows which values belong to which of the mediums according to the seventh embodiment and the comparison mediums. TABLE 8 Reproduced outputs

[0110] As can be seen from the table 8, the reproduced outputs are sufficiently secured in the region lower than the mediums G1 to G6 of the present embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums GG6 to GG12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) on the lower soft magnetic film. From this FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0111] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). Also, in case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) are lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 is satisfied. It is necessary to satisfy the relationship of μ·δb≧1000 and to satisfy simultaneously a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0112] On the other hand, a signal having a recording density of 300 kFRPI is recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs are thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Fe84.9Si_(9.6)Al_(5.5) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(9.6)Al_(5.5) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(9.6)Al_(5.5) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0113] From the above, if a Fe_(84.9)Si_(9.6)Al_(5.5) film was used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 was satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(9.6)Al_(5.5) film is μ and the film thickness thereof is δ_(b), a sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the seventh embodiment. As a conclusion, by using a Fe_(84.9)Si_(9.6)Al_(5.5) film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦ μ≦200, and δ_(b)≦500 nm, the lower soft magnetic film can be more thinned than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the present embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film can be made thinner and a process of manufacturing a medium can be made easier.

[0114] [The Eighth Embodiment]

[0115] Like the first embodiment, total seventy different kinds of Fe_(84.9)Si_(9.6)Al_(5.5) films were prepared by use of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets, i.e., Fe_(84.9)Si_(9.6)Al_(5.5) films respectively having seven different magnetic permeabilities μ were prepared for every one of ten different film thicknesses δ_(b). Also, like the first embodiment, mediums were prepared using CeCo₁₇ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Fe_(84.9)Si_(9.6)Al_(5.5) films formed separately from those formed for the purpose of measurement of magnetic permeability.

[0116] At this time, like the first embodiment, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·_(b)=1000, e.g., (μ, δ_(b))= (5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums H1 to H6 according to the present embodiment. In addition, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))=(5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums HH1 to HH4. Also, a medium having a combination which satisfies μ·δ_(b)=400, e.g., (μ, δ_(b)) =(20, 20) was named a comparison medium HH5. Further, mediums with Fe_(84.9)Si_(9.6)Al_(5.5) films each having permeabilities μ=2 to 200 and a film thickness δ_(b)=750 nm were respectively named comparison mediums HH6 to HH12.

[0117] Also, in the eighth embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) as the lower soft magnetic films which were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) as the lower soft magnetic films were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0118] Then, the vertical magnetic anisotropic energy Ku of each CeCo₁₇ film was measured by a magnetic torque meter to find Ku=5×10⁸ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=8.5 [kOe].

[0119] Recording/reproducing tests were made on total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 9 shows the values of reproduced outputs. This table 9 also shows which values belong to which of the mediums according to the present embodiment and the comparison mediums. TABLE 9 Reproduced Outputs

[0120] As can be seen from the table 9, the reproduced outputs are sufficiently secured in the region lower than the mediums H1 to H6 of the eighth embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums HH6 to HH12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability μ of the lower soft magnetic film and the vertical axis expresses the film thickness δ_(b) thereof. From this FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0121] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). In case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) are lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed on the lower soft magnetic film is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of a μ·δ_(b)≧1000 was satisfied. It is necessary to satisfy the relationship of ν·δ_(b)≧1000 and to satisfy simultaneously a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0122] On the other hand, a signal having a recording density of 300 kFRPI was recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs were thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Fe_(84.9)Si_(9.6)Al_(5.5) film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Fe_(84.9)Si_(9.6)Al_(5.5) film has smaller anisotropy and is more isotropic than the Ni_(21.5)Fe_(78.5) film. Therefore, the Fe_(84.9)Si_(9.6)Al_(5.5) film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0123] From the above, if a Fe_(84.9)Si_(9.6)Al_(5.5) film was used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of a δ_(b)≧1000 is satisfied and if relationships of 5≦μ≦ 200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Fe_(84.9)Si_(9.6)Al_(5.5) film was μ and the film thickness thereof was μ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the eight embodiment. As a conclusion, by using a Fe_(84.9)Si_(9.6)Al_(5.5) film as a lower soft magnetic film and by satisfying the conditions of ν·δ_(b)≧1000, 5≧μ≧200, and δ_(b)≦500 nm, the lower soft magnetic film can be made thinner than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the present embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium in which the lower soft magnetic film can be made thinner and a process of manufacturing a medium can be made easier.

[0124] [The Ninth Embodiment]

[0125] In the same manner as in the first embodiment, samples were prepared in which Co₆₂Ni₁₂Fe₂₆ films were formed on substrates using 62wt%Co-12wt%Ni-26wt%Fe targets were used in place of 84.9wt%Fe-9.6wt%Si-5.5wt%Al targets used in the first embodiment. Like the first embodiment, total seventy different kinds of samples with Co₆₂Ni₁₂Fe₂₆ films were prepared. Also, like the first embodiment, mediums were prepared using SmCo₁₇ (at%) targets in place of the 50at%Fe-50at%Pt targets used in the first embodiment, on Co₆₂Ni₁₂Fe₂₆ films formed separately from those formed for the purpose of measurement of magnetic permeability.

[0126] At this time, like the first embodiment, mediums having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5) were respectively named vertical magnetic recording mediums J1 to J6 according to the ninth embodiment. In addition, mediums having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=500, e.g., (μ, δ_(b))= (5, 100), (10, 50), (50, 10), and (100, 5) were respectively named comparison mediums JJ1 to JJ4. Also, a medium having Co₆₂Ni₁₂Fe₂₆ films having combinations of a permeability μ and a film thickness δ_(b) [nm] that satisfies μ·δ_(b)=400, e.g., (μ, δ_(b))= (20, 20) was named a comparison medium JJ5. Further, mediums having Co₆₂Ni₁₂Fe₂₆ films each having permeabilities μ=2 to 200 and a film thickness δ_(b)= 750 nm were respectively named comparison mediums JJ6 to JJ12.

[0127] Also, in the ninth embodiment, like the first embodiment, conventional mediums AB1 to AB4 as vertical two-layer mediums having Ni_(21.5)Fe_(78.5) films as the lower soft magnetic films were formed to have a permeability μ and a film thickness δ_(b) [nm] that satisfy μ·δ_(b)=2000, e.g., (μ, δ_(b))=(10, 200), (20, 100), (100, 20), and (200, 10). Also, conventional comparison mediums AC1 to AC6 were formed to have a permeability μ and a film thickness δ_(b) [nm] satisfy μ·δ_(b)=1000, e.g., (μ, δ_(b))=(5, 200), (10, 100), (20, 50), (50, 20), (100, 10), and (200, 5).

[0128] Then, the vertical magnetic anisotropic energy Ku of each Sm₂Co₁₇ film was measured by a magnetic torque meter to find Ku =7×10⁸ [erg/cc]. In addition, the coercive force in the direction vertical to the film surface was measured by a Kerr rotation angle measurement device to find Hc=10.0 [kOe].

[0129] Recording/reproducing tests were made to total seventy kinds of vertical magnetic recording mediums having seven different permeabilities for every one of ten different film thicknesses of lower soft magnetic films, under the same conditions as those of the first embodiment. Specifically, a signal having a recording density of 300 kFRPI was recorded, and thereafter, a reproduced output thereof was measured. Table 10 shows the values of reproduced outputs. This table 10 also shows which values belong to which of the mediums according to the ninth embodiment and the comparison mediums. TABLE 10 Reproduced outputs

[0130] As can be seen from the table 10, the reproduced outputs are sufficiently secured in the region lower than the mediums J1 to J6 of the present embodiment. On the other hand, reproduced outputs can be greatly lowered in the region upper than the comparison mediums JJ6 to JJ12. FIG. 4 also summarizes the results obtained above, in a different manner, where the horizontal axis expresses the magnetic permeability a of the lower soft magnetic film and the vertical expresses the film thickness δ_(b) thereof. From FIG. 4, it is found that sufficient reproduced outputs can be secured where μ·δ_(b)≧1000 is satisfied.

[0131] In case where the magnetic permeability μ of the lower soft magnetic film is two, sufficient reproduced outputs cannot be secured with respect to any of the film thicknesses δ_(b). In case where the film thickness δ_(b) is 2 nm, sufficient reproduced outputs cannot be secured with respect to any of the permeabilities μ. This is because the permeability μ and the film thickness δ_(b) were lower than required. Further, the reproduced output tends to decrease even when the film thickness δ_(b) of the lower soft magnetic film exceeds 500 nm. This is because the surface smoothness of the lower soft magnetic film is disturbed since the film thickness δ_(b) of the lower soft magnetic film is thicker than required. Consequently, the vertical orientation of the vertical magnetization film formed thereon is deteriorated. Hence, it is found that all values of (μ, δ_(b)) that satisfy the relationship of μ·δ_(b)≧1000 cannot be always used for practical design even if the relationship of μ·δ_(b)≧1000 is satisfied. But, it is necessary to satisfy the relationship of μ·δ_(b)≧ 1000 and to satisfy simultaneously a relationship of 5≦μ≦200 and a relationship that δ_(b) was 500 nm or less.

[0132] On the other hand, a signal having a recording density of 300 kFRPI was recorded on the conventional mediums AB1 to AB4 and the conventional comparison mediums AC1 to AC6. Reproduced outputs were thereafter measured with a MR head. As shown in the first embodiment, the value of μ·δ_(b)=1000 is insufficient to obtain securely a recording/reproducing sensitivity but the value of μ·δ_(b) requires at least μ·δ_(b)=2000 or more. From this, a vertical two-layer medium which uses a Co₆₂Ni₁₂Fe₂₆ film as its lower soft magnetic film can obtain more securely a recording/reproducing sensitivity than a vertical two-layer medium which uses a Ni_(21.5)Fe_(78.5) film as its lower soft magnetic film, even if the value of μ·δ_(b) is small. In other words, the lower soft magnetic film can be designed to be thinner. This is because the Co₆₂Ni₁₂Fe₂₆ film has greater saturation magnetization than the Ni_(21.5)Fe_(78.5) film. Therefore, the Co₆₂Ni₁₂Fe₂₆ film has a higher sensitivity to the magnetic field generated by the recording head, so that the recording/reproducing sensitivity is improved as a result.

[0133] From the above, if a Co₆₂Ni₁₂Fe₂₆ film was used in place of a Ni_(21.5)Fe_(78.5) film for a vertical two-layer medium, design can be made with a lower value of μ·δ_(b). If the relationship of μ·δ_(b)≧1000 is satisfied and if relationships of 5≦ν≦200 and δ_(b)≦500 nm are satisfied simultaneously where the magnetic permeability of the Co₆₂Ni₁₂Fe₂₆ film is μ and the film thickness thereof is δ_(b), sufficient recording/reproducing sensitivity can be secured even in case where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional vertical magnetization films, as in the present embodiment. As a conclusion, by using a Co₆₂Ni₁₂Fe₂₆ film as a lower soft magnetic film and by satisfying the conditions of μ·δ_(b)≧1000, 5≦μ≦ 200, and δ_(b)≦500 nm, the lower soft magnetic film can be more thinned than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used conventionally as a lower soft magnetic film, even if where the vertical magnetic anisotropic energy Ku and the coercive force Hc in the direction vertical to the film surface are much greater than those of conventional CoCr-based vertical magnetization films (e.g., Ku is about 5×10⁶ [erg/cc] and Hc is about 3 [kOe]), as in the case of the material used in the present embodiment. Accordingly, it is possible to obtain a novel vertical two-layer medium which enables thinning of the lower soft magnetic film and easier process of manufacturing a medium.

[0134] From the results of the above first to ninth embodiments, it is apparent that the same advantages as obtained in the first to ninth embodiments can be obtained regardless of the material of the vertical magnetization film, if the vertical magnetic anisotropic energy of the vertical magnetization film falls within the range of 1×10⁷ [erg/cc]≦Ku≦7× 10⁸ [erg/cc] and if the coercive force in the direction vertical to the film surface of the vertical magnetization film falls within the range of 5 [kOe]≦ Hc≦10 [kOe].

[0135] Although embodiments of the present invention have been described above on the basis of the drawings, specific structures of the present invention were not limited to those described in the above embodiments but may be variously modified without deviating from the subject of the present invention.

[0136] As has been described above, according to the present invention, a vertical magnetic recording medium was composed of layering a lower soft magnetic film and a vertical magnetization film on a substrate made of a non-magnetic material. Here, the lower soft magnetic film is arranged to satisfy a relationship of μ·δ_(b)≧=1000 where μ is the magnetic permeability of the lower soft magnetic film and δ_(b) is the film thickness thereof. Therefore, even if FePt alloy or RCo alloy (where R=Y, Ce, Sm, La, Pr) as a vertical magnetization film has much greater vertical magnetic anisotropic energy Ku and a much greater coercive force Hc in the direction vertical to the film surface than those of a CoCr-based vertical magnetization film which is often used conventionally and generally, the lower soft magnetic film can be more thinned than in the case of using a Ni_(21.5)Fe_(78.5) film which is often used as the lower soft magnetic film. Accordingly, it is possible to realize a easy process for preparing a medium and to obtain a novel vertical two-layer medium. 

What is claimed is:
 1. A vertical magnetic recording medium comprising: a soft magnetic film formed on a substrate; and a vertical magnetization film formed on said soft magnetic film, wherein μ·δ_(b)≧1000 where μ is a permeability of said soft magnetic film, and δ_(b) [nm] is a film thickness of said soft magnetic film.
 2. The vertical magnetic recording medium according to claim 1 , wherein said permeability μ of said soft magnetic film is 5≦μ≦200.
 3. The vertical magnetic recording medium according to claim 1 , wherein said film thickness δb of said soft magnetic film is equal to or less than 500 nm.
 4. The vertical magnetic recording medium according to claim 1 , wherein vertical magnetic anisotropy energy Ku [erg/cc] of said vertical magnetization film is 1×10⁷≦Ku≦7×10⁸.
 5. The vertical magnetic recording medium according to claim 1 , wherein coercive force Hc [kOe] of said vertical magnetization film in the vertical direction to a surface of said vertical magnetization film is 5≦Hc≦10.
 6. The vertical magnetic recording medium according to claim 1 , wherein said vertical magnetization film comprises FePt alloy.
 7. The vertical magnetic recording medium according to claim 6 , wherein said vertical magnetization film comprises xat%Fe-(100-x)at%Pt alloy, where 40≦x≦60.
 8. The vertical magnetic recording medium according to claim 7 , wherein said vertical magnetization film comprises 50at%Fe-50at%Pt alloy, where x=50 at%.
 9. The vertical magnetic recording medium according to claim 1 , wherein said vertical magnetization film comprises RCo alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr.
 10. The vertical magnetic recording medium according to claim 9 , wherein said vertical magnetization film comprises RCo₅ alloy, where R is one or more selected from the group consisting of Y, Ce and Sm.
 11. The vertical magnetic recording medium according to claim 9 , wherein said vertical magnetization film comprises R₂Co₁₇ alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr.
 12. The vertical magnetic recording medium according to claim 1 , wherein said soft magnetic film comprises FeSiAl alloy.
 13. The vertical magnetic recording medium according to claim 12 , wherein said vertical magnetization film comprises 84.9wt%Fe-xwt%Si-(15.1-x)wt%Al alloy, where 8.0≦x≦12.0.
 14. The vertical magnetic recording medium according to claim 13 , wherein said vertical magnetization film comprises 84.9wt%Fe-9.6wt%Si-5.5wt%Al.
 15. The vertical magnetic recording medium according to claim 1 , wherein said soft magnetic film comprises CoNiFe alloy.
 16. The vertical magnetic recording medium according to claim 15 , wherein said soft magnetic film comprises 62at%Co-12at%Ni-26at%Fe alloy.
 17. A vertical magnetic recording medium comprising: a soft magnetic film formed on a substrate; and a vertical magnetization film formed on said soft magnetic film, wherein μ·δb≧1000 where μ is a permeability of said soft magnetic film, and δb [nm] is a film thickness of said soft magnetic film, said permeability μ of said soft magnetic film is 5≦μ≦200, and said film thickness δb of said soft magnetic film is equal to or less than 500 nm.
 18. The vertical magnetic recording medium according to claim 17 , wherein said vertical magnetization film comprises FePt alloy.
 19. The vertical magnetic recording medium according to claim 17 , wherein said vertical magnetization film comprises RCo alloy, where R is one or more selected from the group consisting of Y, Ce, Sm, La and Pr.
 20. The vertical magnetic recording medium according to claim 17 , wherein said soft magnetic film comprises FeSiAl alloy.
 21. The vertical magnetic recording medium according to claim 17 , wherein said soft magnetic film comprises CoNiFe alloy.
 22. The vertical magnetic recording medium according to claim 17 , wherein vertical magnetic anisotropy energy Ku [erg/cc] of said vertical magnetization film is 1×10⁷≦Ku≦7×10⁸.
 23. The vertical magnetic recording medium according to claim 17 , wherein coercive force Hc [kOe] of said vertical magnetization film in the vertical direction to a surface of said vertical magnetization film is 5≦Hc≦10. 